R. Joseph Kline

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🏛 National Institute of Standards and Technology📍 USORCID: 0000-0003-4693-9083

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Publications

"Non-destructive" dimensional metrology of EUV resist gratings (Conference Presentation)
Advanced Lithography2017
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X-ray scattering critical dimensional metrology using a compact x-ray source for next generation semiconductor devices
2017Cited 27×
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Soft X-ray characterization of block copolymers for directed self assembly
Acta Crystallographica Section A Foundations and Advances2020Cited 1×
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Reducing Block Copolymer Interfacial Widths through Polymer Additives