TA
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Publications
4
- Modeling the polarized X-ray scattering from periodic nanostructures with molecular anisotropy.View →Journal of Applied Crystallography2017Cited 2×
- Intercomparison between optical and x-ray scatterometry measurements of FinFET structuresView →Advanced Lithography2013Cited 15×
- An ultra-high vacuum ellipsometer for EUV Mueller matrix spectroscopic ellipsometryView →Metrology, Inspection, and Process Control XL2026