KL
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Publications
3
- Fundamental relationships between pattern quality and properties of block copolymers in directed self-assemblyView →Novel Patterning Technologies 20262026
- Resonant soft x-ray reflectivity studies of high-𝝌, low-N block copolymers for directed self-assembly at EUV-relevant dimensionsView →Novel Patterning Technologies 20262026
- Relating materials properties to block copolymer interfacial roughness in thin films with soft x-ray measurementsView →Novel Patterning Technologies 20262026