Daniel F. Sunday

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Publications

Determination of the internal morphology of nanostructures patterned by directed self assembly.
ACS Nano2014Cited 60×
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Compact X-ray Sources for Metrology Applications in the Semiconductor Industry
2016Cited 1×
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Relating materials properties to block copolymer interfacial roughness in thin films with soft x-ray measurements
Novel Patterning Technologies 20262026
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Methodology for evaluating the information distribution in small angle scattering from periodic nanostructures