Guillaume Freychet

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🏛 Lawrence Berkeley National Laboratory📍 USORCID: 0000-0001-8406-798X

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Publications

Critical-dimension grazing incidence small angle x-ray scattering
Advanced Lithography2018Cited 11×
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X-ray characterization of contact holes for block copolymer lithography
Journal of Applied Crystallography2019Cited 9×
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Characterizing the internal structure of BCP filled contact holes with critical dimension small angle x-ray scattering (Conference Presentation)
2018
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Xi-cam: a versatile interface for data visualization and analysis.