John S. Villarrubia

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🏛 National Institute of Standards and Technology📍 USORCID: 0000-0001-7791-6293

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Publications

Scanning electron microscope measurement of width and shape of 10nm patterned lines using a JMONSEL-modeled library.
Ultramicroscopy2015Cited 114×
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Optimizing hybrid metrology through a consistent multi-tool parameter set and uncertainty model
Advanced Lithography2014Cited 14×
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