D. Windover

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Publications

Compact X-ray Sources for Metrology Applications in the Semiconductor Industry
2016Cited 1×
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X-ray scattering critical dimensional metrology using a compact x-ray source for next generation semiconductor devices
2017Cited 27×
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Advancing x-ray scattering metrology using inverse genetic algorithms
Journal of Edugeography2016Cited 35×
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"Non-destructive" dimensional metrology of EUV resist gratings (Conference Presentation)